Repeatability and reproducibility standard deviations in the measurement of trace moisture generated using permeation tubes
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چکیده
منابع مشابه
Repeatability and Reproducibility Standard Deviations in the Measurement of Trace Moisture Generated Using Permeation Tubes
Permeation-tube moisture generators are used in industry as calibrated sources of water vapor and carrier gas mixtures. Measurements were made using three permeation-tube moisture generators of the type used in the semiconductor industry. This paper describes repeatability and reproducibility standard deviations in measurement of moisture concentration from such generators. Repeatability refers...
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ژورنال
عنوان ژورنال: Journal of Research of the National Institute of Standards and Technology
سال: 2003
ISSN: 1044-677X
DOI: 10.6028/jres.108.022